Posted to News on 23rd Jan 2017, 00:00
XY piezo nanopositioning stages with 50x50mm aperture
Aerotech’s QNP2 series XY, parallel-kinematic, piezo positioning stages combine sub-nanometer resolution, high dynamics, and excellent geometric performance in a compact, low-profile package. The QNP2-100-XYA has a 50x50mm clear aperture with closed-loop travels up to 100x100µm (open-loop travels to 120x120µm). The design is ideal for optical microscopy, scanning probe microscopy, x-ray transmission microscopy, and other tasks where two-sided access is required.
QNP2 piezo stages employ a parallel-kinematic flexure and metrology design that ensures the highest level of multi-axis accuracy. FEA-optimised precision flexures ensure high-stiffness and long device life. High stiffness and resonant frequency enable exceptional process throughput and fast closed-loop response. A patent-pending drive design minimizes yaw errors.
