Precision sensor manufacturer Micro-Epsilon has further developed its interferoMETER range of white light interferometers to include a system designed for non-contact, high precision, high speed thickness measurement of thin transparent single layers and multi-layer coatings.
This further expands the range of potential applications in the semiconductor, metal processing and packaging industries.
With a measuring rate up to 24 kHz, the new interferoMETER IMS5200-TH is designed for fast, high precision inline thickness measurements. It measures layer thicknesses from 1 um to 100 um with nanometre precision and with excellent linearity of < +/- 100 nm. In addition, multi-peak measurement of up to five thin film layers is possible. xtagstartz/p>
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