High-precision XYZ piezo stage designed for super-resolution microscopy, AFM, surface metrology and advanced imaging

The P-733 combines frictionless flexure guidance with high-accuracy capacitive position feedback to achieve sub-nanometre positioning performance and highly repeatable motion. Travel ranges of up to 100 100 um in X and Y and 10 m in Z enable precision sample scanning and measurement across comparatively large areas. A 50 50 mm clear aperture supports transmitted-light microscopy and other optical imaging techniques.

For applications that demand the highest scanning speeds and fastest settling times, the P-733.3DD direct-drive version provides 30 30 10 um travel with the same 0.1 nm resolution. Its high-stiffness design supports rapid scanning and dynamic positioning, with resonant frequencies exceeding 1 kHz.

The stage architecture incorporates parallel kinematics and parallel metrology, ensuring that all motion axes are measured relative to a common fixed reference. This design actively compensates for crosstalk and guiding errors, helping maintain nanometre-level tracking accuracy during high-speed scanning and precision measurement tasks.

The P-733 is designed for a broad range of industrial and scientific applications, including super-resolution and confocal microscopy, AFM, surface characterisation, wafer positioning, nanoimprinting, micromanipulation, precision optics, and image stabilisation. Ultra-high-vacuum-compatible and nonmagnetic configurations are available for specialised environments.